Serial Number
77076607
Owner
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDAttorney
CYNTHIA C. WEBERFiling Date
Jan 5, 2007
OPAL Trademark
Serial Number: 77076607 • Registration: 3823490
Trademark Classes
Owner Contact Info
TUBNEY WOODS, ABINGDON
OXON OX13 5QX , GB
Entity Type: 99
TUBNEY WOODS
ABINGDON, OXON OX13 5QX , GB
Entity Type: 99
ABINGDON, OXON OX135QX , GB
Entity Type: 03
Legal Representation
Trademark Details
Filing Date
January 5, 2007
Registration Date
July 27, 2010
Published for Opposition
May 11, 2010
Cancellation Date
March 3, 2017
Goods & Services
Apparatus for thin film deposition, including atomic layer deposition, namely, a reaction chamber, an energy source, means for introducing precursor and substrate chemical preparations into the reaction chamber, and sensors for measuring and monitoring deposition growth
Machines for manufacturing semiconductors