Serial Number
79163066
Owner
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDAttorney
Mainak H. MehtaFiling Date
Oct 29, 2014
POLARIS Trademark
Serial Number: 79163066 • Registration: 4938887
Trademark Classes
Owner Contact Info
TUBNEY WOODS, ABINGDON
OXON OX13 5QX , GB
Entity Type: 99
Legal Representation
Correspondence Address
Mainak H. Mehta Procopio, Cory, Hargreaves & Savitch LLP
525 B. Street, Suite 2200
San Diego, CA 92101
UNITED STATES
Trademark Details
Filing Date
October 29, 2014
Registration Date
April 19, 2016
Published for Opposition
October 27, 2015
Cancellation Date
October 28, 2024
Goods & Services
Scientific and laboratory apparatus and instruments in the field of plasma technology and semiconductor processing, namely, plasma sources, sources for generating plasma, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber; apparatus and instruments for plasma generation, sources for generating ionized gas plasma, comprising scientific instruments for the creation of plasma, scientific instruments used to ionise gas in a reaction chamber, creation of plasma via induction coupling all being laboratory apparatus and instruments; plasma research apparatus and instruments, namely, plasma etching apparatus comprising scientific instruments to ionise gas for the etching of silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, scientific instruments used to etch silicon and semiconductor, conductor and insulating materials and semiconductor wafers and thin solid films on semiconductor wafers, all being laboratory apparatus and instruments; plasma cluster tools, namely, scientific apparatus comprising multiple plasma etching chambers sharing a common vacuum wafer loading module, all being laboratory apparatus and instruments; computer hardware and software for use in operating the aforesaid goods
