SOURCE METROLOGY INSTRUMENT (SMI) Trademark
Serial Number: 76574016 • Registration: 3101233
Trademark Classes
Owner Contact Info
Trademark Details
Filing Date
January 16, 2004
Registration Date
June 6, 2006
First Use Anywhere
January 1, 1995
First Use in Commerce
January 1, 1995
Published for Opposition
June 21, 2005
Cancellation Date
January 11, 2013
Goods & Services
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and in-situ imaging objectives of the pinhole, refractive or reflective kind, in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the surfaces of wafers for use in manufacturing of integrated circuits
