Serial Number
77771069
Owner
Nanometrics IncorporatedAttorney
Grace Han StantonFiling Date
Jun 30, 2009
SENTINEL Trademark
Serial Number: 77771069
Trademark Classes
Owner Contact Info
Legal Representation
Trademark Details
Filing Date
June 30, 2009
Registration Date
Not Registered
Published for Opposition
June 8, 2010
Goods & Services
Optical inspection system for semiconductor wafers in various stages of processing, said system comprised of imaging cameras, optical filters, control computer, and monochromatic illumination source comprised of laser and LED light sensors, the foregoing used to illuminate semiconductor wafers by ultra violet, infra-red and visible light, and thereby to acquire a spatial or spatial/spectral image of the band-edge luminescence emitted by the wafer using an imaging camera