Serial Number
99220330
Owner
KLA CorporationAttorney
Paul A. RodriguezFirst Use Date
Dec 1, 2011
Filing Date
Jun 5, 2025
SCANNERTEMP Trademark
Serial Number: 99220330
Trademark Classes
Owner Contact Info
Legal Representation
Correspondence Address
Paul A. Rodriguez Dickinson Wright PLLC
2600 W. Big Beaver Rd., Suite 300
Troy, MI 48084
UNITED STATES OF AMERICA
Trademark Details
Filing Date
June 5, 2025
Registration Date
Not Registered
First Use Anywhere
December 1, 2011
First Use in Commerce
December 1, 2011
Goods & Services
Apparatus and instruments for physics, namely, wafer temperature measurement devices, in situ temperature sensors for semiconductor manufacturing, lithography scanner temperature monitoring instruments for dry, immersion, and Extreme Ultraviolet (EUV) systems, scientific instruments for recording temporal and spatial wafer temperature data; Electronic sensors for temperature measurement within semiconductor lithography systems; environmental data acquisition systems, namely, data processing apparatus for wafer temperature and chamber condition analysis, modeling, and process optimization; Recorded computer software for semiconductor wafer process monitoring and analysis; Downloadable computer software applications for semiconductor wafer process monitoring and analysis