Serial Number
50146600
Owner
Brooks Automation US, LLCAttorney
Christopher K. AlbertFiling Date
Oct 6, 2026
OPTIPATH Trademark
Serial Number: 50146600
Trademark Classes
Owner Contact Info
Legal Representation
Correspondence Address
Christopher K. Albert Hamilton, Brook, Smith & Reynolds, P.C.
155 Seaport Boulevard
Boston, MA 02210
United States
Trademark Details
Filing Date
October 6, 2026
Registration Date
Not Registered
Goods & Services
Semiconductor substrates manufacturing machines; Automated transport chambers for semiconductor manufacturing; Semiconductor manufacturing machines; Semiconductor substrate processing machines; Semiconductor substrate processing equipment; Electromagnetic levitation-based material handling machines and apparatus for transporting semiconductor substrates and wafers, silicon substrates, reticles, and panels; Transport chambers, vacuum chambers, wafer movers, load ports, slot valves, and modular transport chambers for transporting substrates, semiconductor wafers, silicon substrates, reticles, and panels; Equipment front-end modules (EFEMs) for loading and unloading substrates, semiconductor wafers, silicon substrates, reticles, and panels; Load ports for semiconductor manufacturing machines