Serial Number
76260293
Owner
MKS INC.Attorney
John L. DuPre'First Use Date
Jan 29, 2001
Filing Date
May 21, 2001
MKS Trademark
Serial Number: 76260293 • Registration: 2697197
Trademark Classes
Owner Contact Info
Legal Representation
Correspondence Address
John L. DuPre' Hamilton, Brook, Smith & Reynolds, P.C.
155 Seaport Blvd.
Boston, MA 02210
United States
Trademark Details
Filing Date
May 21, 2001
Registration Date
March 18, 2003
First Use Anywhere
January 29, 2001
First Use in Commerce
January 29, 2001
Published for Opposition
December 24, 2002
Goods & Services
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; Residual gas analyzers; Process and optical monitors for detecting gas compositions within a process chamber; Quadrapole mass spectrometers; Electrical analog-digital interface adapters, gateway and card modules; Radio frequency, direct current and microwave power supplies and generators; Power generators for converting energy from chemical gas reactions to power for running processes with a process chamber; Thermal, electrical and pressure-based mass flow controllers; Gas pressure valves for controlling and shutting off gas flow; Vacuum and gas component heaters; Gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; [Gas filters and purifiers;] Heaters; Helium leak detectors; Gas detector and analyzer for monitoring gas emissions for safety and compliance; Calibration equipment for pressure and flow transducers, and for flow meters; Vacuum gauge systems, vacuum gauges, transducers, metal pipe and hose fittings, pressure valves, heater jackets and traps for capturing waste materials exiting from a process chamber; Liquid delivery system composed primarily of a pump, vaporizer, and power controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; In situ flow verifier of process or purge gases; Vacuum sensing and switching equipment, namely, vacuum sensor switches; [Hardware and software for measuring the transmissivity, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same;] Software for operating optical spectrometers; Software for operating quadrapole mass spectrometers; Software for determining the presence and measurement of residual contaminants in a semiconductor process; Electronic control accessories, namely, micro-processor based data communication devices for communicating between quadrapole mass analyzers and a computer
