Serial Number
76694146
Owner
Nanometrics IncorporatedAttorney
Heather J. KliebensteinFirst Use Date
Sep 23, 2008
Filing Date
Nov 10, 2008
LYNX Trademark
Serial Number: 76694146 • Registration: 3987463
Trademark Classes
Owner Contact Info
Legal Representation
Trademark Details
Filing Date
November 10, 2008
Registration Date
July 5, 2011
First Use Anywhere
September 23, 2008
First Use in Commerce
September 23, 2008
Published for Opposition
April 19, 2011
Goods & Services
A fully automated, environmentally controlled, wafer handling system, primarily composed of a high-speed robot, control computer, clean air handling unit, and load ports for receiving wafers, designed to support multiple metrology modules for measurement of optical-critical dimensions, registration and overlay, and thin film thickness on wafers in the quality control aspect of the wafer manufacturing process