LUMENA Trademark
Serial Number: 76634075
Trademark Classes
Owner Contact Info
Trademark Details
Filing Date
March 22, 2005
Registration Date
Not Registered
First Use Anywhere
February 1, 2005
First Use in Commerce
February 17, 2005
Goods & Services
optical metrology product that provides an accurate measurement of the Numerical Aperture of a lithography tool and variation of same across the stepper or scanner exposure field, by utilizing an instrument that fits in a standard reticle/pellicle envelope, and a software package that processes the wafer images