HIGH ACCURACY SOURCE METROLOGY INSTRUMENT (HA-SMI). Trademark
Serial Number: 76587121 • Registration: 3124041
Trademark Classes
Owner Contact Info
Trademark Details
Filing Date
April 14, 2004
Registration Date
August 1, 2006
First Use Anywhere
June 1, 2004
First Use in Commerce
September 1, 2004
Published for Opposition
September 13, 2005
Cancellation Date
March 8, 2013
Goods & Services
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and an in-situ imaging objective with mounting means attached to a framework in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the sufraces of wafers for use in manufacturing of integrated circuits