EUV WAFER Trademark
Serial Number: 99244546
Trademark Classes
Owner Contact Info
Legal Representation
Correspondence Address
Paul A. Rodriguez Dickinson Wright PLLC
2600 W. Big Beaver Rd., Suite 300
Troy, MI 48084
United States
Trademark Details
Filing Date
June 20, 2025
Registration Date
Not Registered
Goods & Services
Apparatus and instruments for physics, namely, extreme ultraviolet (EUV) radiation-measurement wafers equipped with embedded EUV sensitive electronic sensors for monitoring wafer level EUV exposure and environmental conditions inside EUV semiconductor processing systems; Diagnostic equipment for research laboratory use, namely, EUV sensing wafers for measuring EUV radiation levels and chamber environmental characteristics during semiconductor wafer processing; Measures for measuring EUV radiation distribution and environmental characteristics within semiconductor process chambers; Computer software, recorded, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing; Computer software applications, downloadable, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing
Filing History
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Serial #79432053
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