Serial Number
99244602
Owner
KLA CorporationAttorney
Paul A. RodriguezFirst Use Date
Dec 31, 2023
Filing Date
Jun 20, 2025
CRYOTEMP Trademark
Serial Number: 99244602
Trademark Classes
Owner Contact Info
Legal Representation
Correspondence Address
Paul A. Rodriguez Dickinson Wright PLLC
2600 W. Big Beaver Rd., Suite 300
Troy, MI 48084
United States
Trademark Details
Filing Date
June 20, 2025
Registration Date
Not Registered
First Use Anywhere
December 31, 2023
First Use in Commerce
December 31, 2023
Goods & Services
Apparatus and instruments for physics, namely, in-situ semiconductor process temperature measurement wafers equipped with embedded electronic temperature sensors for monitoring wafer level thermal profiles inside semiconductor process chambers, particularly plasma etch chambers; Diagnostic equipment for research laboratory use, namely, temperature sensing wafers for measuring wafer temperature and environmental conditions during cryogenic plasma etch processes; Measures for measuring temperature distribution and thermal profiles within etch chambers; Computer software, recorded, for controlling, collecting, analyzing, and displaying cryogenic wafer temperature measurement data; Computer software applications, downloadable, for controlling, collecting, analyzing, and displaying cryogenic wafer temperature measurement data