Serial Number
75601342
Owner
THERMA-WAVE, INC.Attorney
MICHAEL A. STALLMANFirst Use Date
Sep 30, 2003
Filing Date
Dec 8, 1998
µAE Trademark
Serial Number: 75601342 • Registration: 2808899
Trademark Classes
Owner Contact Info
Legal Representation
Trademark Details
Filing Date
December 8, 1998
Registration Date
January 27, 2004
First Use Anywhere
September 30, 2003
First Use in Commerce
September 30, 2003
Published for Opposition
August 8, 2000
Cancellation Date
September 3, 2010
Goods & Services
OPTICAL INSPECTION DEVICE COMPRISED OF AT LEAST TWO ELLIPSOMETERS AND A MICROPROCESSOR, FOR USE IN MONITORING CHARACTERISTICS OF SEMICONDUCTORS DURING FABRICATION